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Title Characteristics of In-situ Annealed LiMn2O4 Thin Films for a MEMS Power System
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LiMn2O4 lms were deposited by using rf magnetron sputtering. To obtain the spinel phase,
we heated the stainless-steel substrate to 450 C during deposition (in-situ annealing). The lms
deposited at ambient temperature had an amorphous phase. At lower substrate temperatures (below
400?

56   Characteristics of In-situ Annealed LiMn2O4 Thin Films... Admin 2012.10.17 828
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