There has been increasing interests in lithium microbatteries with the rapid development of
semiconductor technology and micro-electro-mechanical systems (MEMS). In this work, lithium
manganese oxide, which is more stable and less toxic than other oxides such as lithium nickel oxides
and lithium cobalt oxides, was deposited using rf magnetron sputter, and the e ect of thermal
treatment on its microstructure, surface morphology, and electrode characteristics was investigated.
Post-thermal treatments were done to gain proper crystallization of spinel lithium manganese oxide.
The crystal structure of the samples was characterized by X-ray di raction, scanning electron
microscopy, and atomic force microscopy. For electrochemical tests, half cells were made with the
lithium manganese oxide as the cathode, the lithium metal as the anode, and a 1-M solution of
LiPF6 in EC-DMC (1:1) as the electrolyte. Charge-discharge experiments were performed with
various cut-o voltages and current densities.
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