Abstract : The fabrication of a metal microstructure on pre-patterned organic templates, prepared using SAM and
LB techniques is described. The OTS derivatized substrate was oxidized by AFM anodic oxidation at the threshold
voltage. Site-selective copper structure was then fabricated on the locally modified monolayer based on pre-designed
patterns. The sequential adsorption-reduction of copper ion was carried out, leading to improved metal coverage and
a reduction in defects.
Key words : AFM Anodic Oxidation, Copper, Self-assembled Monolayer, Langmuir-Blodgett Film
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