We report on the preparation of an all solid-state thin film micro-supercapacitor using RuO2 electrode film
and LiPON electrolyte film on a Pt/Ti/Si substrate with dual target dc and rf reactive sputtering. Room temperature
charge-discharge measurements based on a symmetrical RuO2/LiPON/RuO2 structure clearly demonstrated
the cyclibility dependence of the RuO2 electrode on the microstructure. Using both glancing angle
X-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the characteristics
of the thin film supercapacitor are dependent on the microstructure of the RuO2 film. In addition,
high-resolution electron transmission microscopy (HREM) analysis after cycling demonstrates that the interface
layer formed by interfacial reaction between the LiPON and RuO2 acts as the main factor in the degradation
of the performance of the thin film micro-supercapacitor.
Keywords : RuO2, LiPON, transmission electron microscope (TEM), supercapacitor, glancing angle X-ray diffraction (GXRD), cyclibility
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