| General Specifications |
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Analog to Digital Converter(ADC) |
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|
Resolution
|
16 bit
|
|
Input voltage range |
10V |
|
Digital to Analog Converter(DAC) |
|
|
Resolution |
12 bit |
|
Output voltage range |
10V |
Data Sampling |
|
Max. sampling interval |
1 sec |
Interface |
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|
Communication |
TCP/IP (LAN) communication |
Front Panel |
Analog In(AI) Port, 2ea |
|
Connection |
2 speaker terminal blocks |
Input voltage range |
0 ~ 10V |
Input impedance |
10 GOhms |
Analog Out(AO) Port, 2ea |
|
Connection |
2 speaker terminal blocks |
Output voltage range |
0 ~ 10V |
Rear Panel |
MFC Port, 3ea |
|
Connection |
D-sub 9 pin(female) |
Flow control by AO |
0 ~ 5V analog signal out |
|
Flow monitoring by AI |
0 ~ 5V analog signal in |
|
MFC control power |
+15V, -15V |
Temperature Control Port |
|
Connection |
D-sub 9 pin(female) |
Temperature control by DO |
signal relay & SSR, temp. module required |
Temperature control |
PID control |
| Sensing Port |
|
Connection |
D-sub 37 pin(female) |
Analog input |
11ea |
Analog input range |
0 ~ 10V |
Digital input |
2ea |
Default setup, AI |
|
- For temperature sensing, 7ea |
amplifier for thermocouple signal
(temp. option) required |
- For pressure sensing, 4ea |
pressure sensor(4~20mA output) required |
Default setup, DI |
|
- For level sensing |
humidifier required for water level monitoring |
Valve Control Port, 12ea |
|
Connection |
D-sub 25 pin(female) |
Valve control by DO |
solenoid valve required |
Control voltage |
AC220V(default), DC 12V or 24V(option) |
| MFC Module GM1, Option |
Connection |
D-sub 9p(female), 3 ports |
Component |
MFC, valves, tubings |
Max. number of MFCs |
3ea |
Max. flow rate |
within range of 100 ~ 5000 SCCM
user selectable |
Control range |
2% to 100% of full scale |
Accuracy |
± 1% full scale |
Gas supply pressure requirement |
3 bar(43.51psi) |
Tubing material |
SUS 316 |
Temperature Module TM1, Option |
| Temperature Control & Monitoring |
|
|
No. of ports
|
7ea
|
|
Temperature control
|
by SSR (PID control by FC1 controller)
|
|
Temperature sensing
|
|
- Sensor |
K-type thermocouple |
|
- Signal amplication
|
0 ~ 10V output(10mV/℃) |
- Temperature range |
0 ~ 1000℃ |
- Accuracy |
±1℃ |
Temp Monitoring Only |
|
No. of ports |
7ea |
|
Temperature sensing |
|
- Sensor |
K-type thermocouple |
- Signal amplication |
0 ~ 10V output(10mV/℃) |
- Temperature range |
0 ~ 1000℃ |
- Accuracy |
±1℃ |
Humidifier Module HM1, Option |
Temperature Module TM1 is included. |
Type |
membrane type (Nafion tube used) |
Bottle size |
2x 1L(anode & cathode) |
- Base materia |
stainless steel pipes, KS D 3576 |
- Top material |
SUS 304 |
- Sealing |
silicon gasket |
- Insulation material |
urethane foam |
Temperature control by DO |
signal relay & SSR, temp. option required |
|
Temperature control
|
PID control
|
|
Heater
|
band heater, 500Watt
|
|
Tubing material
|
SUS 316
|
|
Fitting
|
DK-LOK, 1/4" |
Water supply |
automatic control with a level sensor |
|
Temperature control
|
by SSR(PID Control by FC1 controller)
|
|
Temperature sensing
|
|
- Sensor |
K-type thermocouple |
- Signal amplication |
0 ~ 10V output(10mV/℃) |
- Temperature range |
0 ~ 1000℃ |
- Accuracy |
±1℃ |
Line heating available |
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